Polymer damper
ASML
In close cooperation with GMT, a polymer damper with an extremely high damping ratio of 50% has been developed and is currently produced in volume.
To apply damping to the suspension of an optical module used in next generation lithography tools, a dedicated polymer damper has been developed. To reach the extremely high damping values, a new polymer material was developed in close cooperation with GMT. The dampers are produced in volume and their performance has been verified. MI-Partners has developed in-depth knowledge regarding the design of polymer dampers. Models have been developed such that these dampers can be developed and produced with a first-time-right strategy in future projects. See the Video.
Challenges
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Achieving extremely high damping by passive means
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Material development with 50 % internal damping at low frequencies
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Material characterization and establishing FEM models
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System level modeling with high predictability
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Series production with high predictability
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Clean room compatibility
Key Competences
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Predictive modeling, dynamic system modeling
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FEM models of polymer material
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Design rules for polymer dampers
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Application and production experience
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Measurement setup to characterize dynamic properties (stiffness, damping) of material and entire dampers
Results
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Entire suspension with dedicated metal spring and dedicated polymer damper
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Verification of dynamic properties (stiffness, damping) of entire suspension
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Modeling and design competence for first-time-right damper development
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Cooperation with GMT to produce customer specific dampers
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Predictive modeling on system and damper level with high predictability
Cooperation
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GMT Gummi-Metall Technik GmbH.