MI-Partners News Archive

MI-Partners BBQ 2016

15 June 2016

The annual BBQ 2016. 



Interview with Thomas Camus

11 December 2015

TunnelTalk interview with Thomas Camus regarding TBM innovations approach field testing.

The main goal of the Seismic vibrator which MI-Partners developed will be highlighted.

Click here for the link.

Shareholders MI-Partners increase their interest

5 August 2015

Click here for the article (in Dutch). 

MI-Partners presents new vibration isolation system on Semicon West

10 July 2015

From 14-16 July MI-Partners will present their latest vibration isolation system at the Semicon West in San Francisco.  This system is developed as being the first isolation system of a product line. Key factors of this anti-vibration solution will be: easy integratable, scalable and low cost. As a proof of this design Bosch Rexroth will be the first, making use of this technology in their demonstrator. This demonstrator can be visited at the booth of Bosch Rexroth:  South Hall Booth 1817.


Damper technology

In the past years MI-Partners is being very active in the field of passive polymer damping. MI-Partners showed that it is possible to design for damping besides stiffness. This means the polymer is not specifically used for their compliant behavior as it is done in many anti-vibration applications. Instead it is principally used for their damping properties. It is possible to create a damper design and accurately predict the corresponding dynamic system behavior. With an industrial supplier polymer products are developed both having high damping values  and show cleanroom compatibility. These dampers modules have been designed  for customers like ASML and NXP. Modal damping ratios up to 30% on system level have been achieved, resulting in remarkable increases in bandwidth. More information of this damping technology can be found here.


Vibration isolation systems

With the success of the recently damped machine designs a question was raised for a modular and easy integratable design for typical (semiconductor) stages. If vibration issues are present on any kind of stage, e.g. inspection or position stages, it should be possible to interchange the current suspension for a more suitable suspension. With this thought in mind a line of three anti-vibration mounts (AVI-mounts) was created, consisting of three different products with their own ways and level of damping:


  • AVI-mount passive (presented at the SEMICON)

    The AVI-mount passive is a low-cost solution for most stage designs to obtain a quick step forward to increase performance. It consists of a passive anti-vibration module consisting of a spring and a polymer damper. Since it is a passive module no electronic connections and hardware is required. The mount is designed on a suspension frequencies of  8-15 Hz. This is slightly higher than the typical anti-vibration system. Principal reason for this cause is that this suspension relies more on damping instead of vibration isolation. With this mount modal damping values between 20-40% are achieved.  It turns out this choice results in a better suppression of vibrations in the low frequent range (1-20Hz).


  • AVI-mount active (patent pending)

    The AVI-mount advanced is an extremely suitable solution for motion stages with high acceleration setpoints, like inspection or positioning stages.  By means of active force cancellation the vibration level can be reduced by more than a factor 10. The force cancellation module consists has  an in and out of plane actuator along the spring-damper combination. Based on feedforward control the actuators compensate the exerted forces on the stage. A set of four modules is capable of compensating up to 150 N in all directions. The spring-damper combination isolates vibrations from the ground. This suspension is designed for a frequency of around 5 Hz and has modal damping values of around 20%.


  • AVI mount advanced (under development)

    The AVI-mount active is for the high-end user requiring nanometer stability. This product is still under development. It will consist of an active feedback loop by means of integrated motion sensors.


  • AVI mount: new anti-vibration solution

Bosch Rexroth shows MIMO gantry demonstrator on Semicon West

9 July 2015

From 14-16 July Bosch Rexroth will show their latest demonstrator at the Semicon West in San Francisco. This demonstrator shows the capability of the new type of industrial NYCe controllers. A highlight of these controllers is the option to perform MIMO gantry control. Furthermore the demonstrator consist of Bosch’ high precision linear guides and linear motion system with integrated encoders. The design, integration and suspension of this demonstrator is done in partnership with MI-Partners. The demonstrator can be seen in South Hall Booth 1817. MI-Partners wishes Bosch Rexroth a successful fair.

For more information see also the website of Bosch Rexroth. For more information on the suspension click here.


 Bosch Rexroth' demonstrator

Annual MI-P BBQ 2015

12 June 2015

The annual BBQ was once again a great success. 

Shareholder receives important award

17 March 2015

Maarten Steinbuch wins the KIVI Acedemic Society Award. 

Click here for the article. (in Dutch)

Hannover Messe 2015

17 March 2015

MI-Partners will be present at the Hannover Messe 2015 on the 13th till 17th of April. 

Please visit us in hall 2 at booth number C12, The Holland High Tech stand.